Material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography and pattern forming method
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US10359701B2
公开(公告)日:2019-07-23
A material for forming an underlayer film for lithography, in which a compound represented by the following formula (0) is used.
(in formula (0), each X independently represents an oxygen atom or a sulfur atom, or a non-crosslinked state, R1 represents a 2n-valent group having 1 to 30 carbon atoms, or a single bond, each R0 independently represents a straight, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aryl group having 6 to 30 carbon atoms, a straight, branched or cyclic alkenyl group having 2 to 30 carbon atoms, a thiol group, a halogen group, a nitro group, an amino group, a carboxylic acid group or a hydroxyl group, the alkyl group, the alkenyl group and the aryl group each optionally include a cyanato group, a thiol group, a halogen group, a nitro group, an amino group, a carboxylic acid group, a hydroxyl group, an ether bond, a ketone bond or an ester bond, each m1 is independently an integer of 0 to 4, in which at least one m1 is an integer of 1 to 4, each m2 is independently an integer of 0 to 3, n is an integer of 1 to 4, and each p is independently 0 or 1.)
一种用于形成光刻用底层薄膜的材料,其中使用了下式 (0) 所代表的化合物。
式(0)中,每个 X 独立地代表氧原子或硫原子,或非交联状态,R1 代表具有 1 至 30 个碳原子的 2n 价基团,或单键,每个 R0 独立地代表具有 1 至 30 个碳原子的直链、支链或环状烷基,具有 6 至 30 个碳原子的芳基,具有 2 至 30 个碳原子的直链、支链或环状烯基,硫醇基,卤素基,硝基,氨基、烷基、烯基和芳基各自可选地包括一个氰基、一个硫醇基、一个卤素基、一个硝基、一个氨基、一个羧酸基、一个羟基、一个醚键、一个酮键、一个羧酸基、一个羟基、一个烷基、一个烯基和一个芳基、醚键、酮键或酯键,每个 m1 独立地为 0 至 4 的整数,其中至少一个 m1 为 1 至 4 的整数,每个 m2 独立地为 0 至 3 的整数,n 为 1 至 4 的整数,每个 p 独立地为 0 或 1。)