申请人:JSR Corporation
公开号:EP2226368A1
公开(公告)日:2010-09-08
A composition for forming an aluminum film, comprising a complex represented by the following formula (1) and a complex represented by the following formula (2), the molar ratio of the complex represented by the following formula (1) and the complex represented by the following formula (2) being 40:60 to 85:15: AlH3⋅NR1R2R3 AlH3⋅NR1R2R32
(in the above formulas (1) and (2), R1, R2 and R3 are each independently a hydrogen atom, alkyl group, cycloalkyl group, alkenyl group, alkynyl group, aryl group or aralkyl group.) .
一种用于形成铝膜的组合物,包括下式(1)代表的络合物和下式(2)代表的络合物,下式(1)代表的络合物和下式(2)代表的络合物的摩尔比为 40:60 至 85:15: AlH3⋅NR1R2R3 AlH3⋅NR1R2R32
(在上述式(1)和式(2)中,R1、R2 和 R3 各自独立地为氢原子、烷基、环烷基、烯基、炔基、芳基或芳烷基)。.