申请人:JAPAN PIONICS CO., LTD.
公开号:EP1460420A1
公开(公告)日:2004-09-22
A detecting agent for gas containing a metal compound comprises pyridylazo compound as a color transition component supported on a carrier. A detection method for detecting a metal compound contained in a gas comprises steps of bringing the gas containing the metal compound into contact with a detecting agent comprising pyridylazo compound as a color transition component supported on a carrier; and detecting a color transition of the detecting agent. According to the present invention, a sensitive detecting agent or a sensitive detection method enables to detect metal compounds contained in a gas exhausted from semiconductor manufacturing process, etc., without affected by accompanying gas like ammonia.
含金属化合物气体的检测剂包括支撑在载体上作为颜色过渡组分的哒嗪化合物。一种用于检测气体中含有的金属化合物的检测方法包括以下步骤:使含有金属化合物的气体与检测剂接触,检测剂包括支撑在载体上作为颜色过渡组分的哒嗪化合物;检测检测剂的颜色过渡。根据本发明,灵敏的检测剂或灵敏的检测方法可以检测半导体制造过程等排出的气体中含有的金属化合物,而不受氨气等伴生气体的影响。