申请人:JSR Corporation
公开号:EP2325695A1
公开(公告)日:2011-05-25
A radiation-sensitive resin composition includes (A) a polymer, (B) a photoacid generator, (C) an acid diffusion controller, and (D) a solvent, the polymer (A) including a repeating unit (a-1) shown by the following general formula (a-1), and the acid diffusion controller (C) including at least one base selected from (C-1) a base shown by the following general formula (C-1) and (C-2) a photodegradable base.
wherein R1 individually represent a hydrogen atom or the like, R represents a monovalent group shown by the above general formula (a'), R19 represents a chain-like hydrocarbon group having 1 to 5 carbon atoms or the like, A represents a divalent chain-like hydrocarbon group having 1 to 30 carbon atoms or the like, m and n are integers from 0 to 3 (m+n=1 to 3), and R2 and R3 individually represent a monovalent chain-like hydrocarbon group having 1 to 20 carbon atoms or the like, provided that the two R2 may bond to form a ring structure.
一种辐射敏感树脂组合物包括(A)聚合物、(B)光酸发生器、(C)酸扩散控制器和(D)溶剂,聚合物(A)包括如下通式(a-1)所示的重复单元(a-1),酸扩散控制器(C)包括至少一种选自(C-1)如下通式(C-1)所示的碱和(C-2)可光降解碱的碱。
其中 R1 单独代表氢原子或类似物,R 代表上述通式(a')所示的一价基团,R19 代表具有 1 至 5 个碳原子或类似物的链状烃基,A 代表具有 1 至 30 个碳原子或类似物的二价链状烃基,m 和 n 是 0 至 3 的整数(m+n=1 至 3),R2 和 R3 单独代表具有 1 至 20 个碳原子或类似物的一价链状烃基,条件是两个 R2 可以键合形成环状结构。