An onium salt and a composition having high sensitivity and excellent pattern characteristics such as LWR, which is preferably used for a resist composition for a lithography process using two active energy rays of a first active energy ray such as an electron beam or an extreme ultraviolet and a second active energy ray such as UV.
一种酰
铵盐和具有高灵敏度和优秀图案特性(如LWR)的组合物,最好用于利用第一活性能量射线(如电子束或极紫外线)和第二活性能量射线(如紫外线)的光刻工艺的光刻胶组合物。