申请人:OCG Microelectronic Materials, Inc.
公开号:EP0709410A2
公开(公告)日:1996-05-01
Novel polymers as claimed in claim 1 may be used in resist formulations for the fabrication of printing plates and circuit boards and, in particular, for the fabrication of integrated circuits. No autocatalytic decomposition of the compounds occurs and the resist film obtained therewith has good adhesive properties.
如权利要求 1 所述的新型聚合物可用于制造印刷板和电路板的抗蚀剂配方,特别是 用于制造集成电路。这些化合物不会发生自催化分解,用其制成的抗蚀剂薄膜具有良好的粘合性能。