The present invention relates to new aromatic-amino functional siloxanes, which are compounds comprising one or two tail groups X2, and a linking group L of structure (2) linking each said tail group to said head group, wherein the head group X has structure (1), containing an optional organic moiety Y, wherein the attachment point of said tail group X2 through said linking group L to the head group X1, may be, at positions a, b, c, d, or e. Another aspect of this invention are compositions containing these novel aromatic amino functional siloxane. A further aspect of this invention are compositions comprised of the above novel aromatic-amino functional siloxanes, and also the composition resulting from the aging of these compositions at room temperature for about 1 day to about 4 weeks. Still further aspects of this invention are processes for forming self-assembled monolayers on a substrate, from the aged composition, and also the processes of coating these aged compositions on patterned porous dielectrics to cap them also the processes of metallization of these capped pattered porous dielectrics.
本发明涉及新的芳香族-
氨基官能团
硅氧烷,它是由一个或两个尾基X2和一个结构(2)的连接基团L将每个所述尾基与所述头基连接的化合物,其中头基X具有结构(1),含有任选的有机分子Y,其中所述尾基X2通过所述连接基团L与头基X1的连接点可以是a、b、c、d或e位。 本发明的另一方面是含有这些新的芳香族
氨基官能团
硅氧烷的组合物。本发明的另一个方面是由上述新型芳香族
氨基官能团
硅氧烷组成的组合物,以及这些组合物在室温下老化约 1 天至约 4 周后得到的组合物。本发明更进一步的方面是利用老化的组合物在基底上形成自组装单层的工艺,以及将这些老化的组合物涂覆在图案化多孔电介质上以封盖它们的工艺,还有将这些封盖的图案化多孔电介质
金属化的工艺。