METHOD OF FORMING POLYARYL POLYMERS AND POLYMERS FORMED THEREBY
申请人:DOW Global Technologies LLC
公开号:US20170051102A1
公开(公告)日:2017-02-23
In a method of forming a polyaryl polymer, a fluorosulfonate-containing monomer is coupled with itself or a boron-containing comonomer in the presence of a catalyst and a base. The resulting polymers can be used as precursors to electrically conducting polymers, and as components of resist or underlayer compositions for photolithography, among other applications.