The molecular precursors [Mo(S2CNEt2)4] (1), [Re(S2CC6H5)(S3CC6H5)2] (2), and [Re2(μ-S)2(S2CNEt2)4] (3) were used to deposit thin films of Re-doped MoS2 at 550 °C by aerosol assisted chemical vapour Deposition (AACVD). ICP-OES was used to quantify the amount of Re dopant in each film which range from ca. 2–17 at% Re, with greater incorporation of Re from films using precursor (3). In general, lightly
分子前体[Mo(S 2 CNEt 2)4 ](1),[Re(S 2 CC 6 H 5)(S 3 CC 6 H 5)2 ](2)和[Re 2(μ-S)2(S 2 CNEt 2)4 ](3)用于通过气溶胶辅助
化学气相沉积(
AACVD)在550°C沉积Re-掺杂的MoS 2薄膜。ICP-OES用于量化每张膜中Re掺杂剂的量,范围从大约0。Re含量为2-17 at%,使用前体(3)可以使薄膜中的Re含量更高。通常,轻掺杂薄膜通过EDX光谱图和p-XRD测量显示出元素均质性和结构保留的证据。然而,拉曼光谱法表明,由于重掺杂(约> 4–7 at%Re),Mo 2的E 2g和A 1g光学声子的消失会丢失MoS 2的结构。,这归因于Re的较大5d轨道引起的层内Re-Re键的引入。电子显微镜显示,掺入Re掺杂剂原子也极大地影响了所制得膜的形貌,从层状结构到簇和小花,尽管在相似的掺杂
水平下,由两种precursor前体制得的膜的形貌均相似。