Sulfonium and iodonium salts of a carboxylate having an aromatic ring to which a nitrogen-containing alkyl or cyclic structure is attached are novel. The onium salt functions as an acid diffusion controlling agent in a resist composition, enabling to form a pattern of good profile with high resolution, improved MEF, LWR and DOF.
一种具有芳香环的
羧酸酯的砜和
碘化物盐,其中连接有含氮烷基或环状结构,是一种新颖的化合物。该砜盐在抗蚀组合物中作为酸扩散控制剂,有助于形成具有高分辨率、改善MEF、LWR和DOF的良好轮廓图案。