A resist underlayer film-forming composition includes a polymer including a structural unit shown by a formula (1), and having a polystyrene-reduced weight average molecular weight of from 3000 to 10000, and a solvent. Each of R3 to R8 independently represents a group shown by a formula (2), a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryl group having 6 to 14 carbon atoms, or a glycidyl ether group having 3 to 6 carbon atoms, wherein at least one of R3 to R8 represents the group shown by the formula (2).
一种抗蚀底层膜形成组合物包括聚合物和溶剂。聚合物包括结构单元,其由式(1)表示,并且具有聚
苯乙烯降低重量平均分子量在3000至10000之间。R3至R8中的每个独立地表示由式(2)表示的基团、氢原子、羟基、具有1至6个碳原子的烷基、具有1至6个碳原子的烷氧基、具有2至10个碳原子的烷氧羰基、具有6至14个碳原子的芳基或具有3至6个碳原子的
环氧乙烷基,其中至少一个R3至R8表示由式(2)表示的基团。