The invention comprises compounds, methods of making, and methods of using. The compounds may have a backbone and three appended functional groups: one lipid, one hydrophilic polymer, and one carbohydrate. Specific functional groups may be selected for specific applications in formulating pharmaceuticals, cosmetics, nutriceuticals, and the like. A variety of linkers between the backbone and functional groups may also be selected to optimize performance.
A resist composition comprising a sulfonium salt having formula (1) as PAG, a base polymer, and an organic solvent, when processed by lithography, has light transmittance, acid diffusion suppressing effect, and excellent lithography performance factors such as DOF, LWR and MEF. A lithography process for forming a resist pattern from the composition is also provided.
ONIUM SALT, CHEMICALLY AMPLIFIED RESIST COMPOSITION AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20220127225A1
公开(公告)日:2022-04-28
An onium salt having formula (1) serving as an acid diffusion inhibitor and a chemically amplified resist composition comprising the acid diffusion inhibitor are provided. When processed by lithography, the resist composition forms a pattern having minimal defects and excellent lithography performance factors such as CDU, LWR and DOF.
(PEG)-lipid conjugates and methods of preparation are disclosed herein. Methods of preparation may involve stepwise addition of small PEG oligomers to a glycerol backbone until a desired chain size is attained. Polymers resulting from the syntheses may be highly monodisperse. The resulting polymers may comprise branched polyethyleneglycol (PEG)-lipid conjugates. The present disclosure may provide several advantages such as simplified synthesis, high product yield and low cost for starting materials. The present synthesis method may be suitable for preparing a wide range of conjugates such as PEG lipid conjugates having a glycerol-like central backbone covalently attached to two or more monodisperse PEG chains and a lipid comprising a range of diesters made from fatty acids or bile acids.
Sulfonium salt, resist composition, and patterning process
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US10754248B2
公开(公告)日:2020-08-25
The present invention provides a sulfonium salt capable of providing a resist composition having few defects in photolithography where a high energy beam is used as a light source, and excellent in lithography performance by controlling acid diffusion.
The present invention was accomplished by a sulfonium salt including an anion and a cation, the cation having a partial structure represented by the following general formula (1), except for a sulfonium salt having a cation represented by the following general formula (1′),