Method and device for producing optimized lipid-based micro/nano-bubbles
申请人:Trust Bio-sonics Inc.
公开号:EP2799087B1
公开(公告)日:2020-03-11
COMPOSITIONS AND METHODS OF DELIVERY OF PHARMACOLOGICAL AGENTS
申请人:Nal Pharmaceutical Group Limited
公开号:EP3672618A1
公开(公告)日:2020-07-01
COMPOSITIONS AND METHODS FOR BIOLOGICAL DELIVERY VEHICLES
申请人:Dnalite Therapeutics, Inc.
公开号:EP3982932A1
公开(公告)日:2022-04-20
IMPROVED FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH
申请人:Entegris, Inc.
公开号:EP4017937A2
公开(公告)日:2022-06-29
FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH
申请人:ENTEGRIS, INC.
公开号:US20210054287A1
公开(公告)日:2021-02-25
Compositions useful for the selective removal of silicon nitride materials relative to polysilicon, silicon oxide materials and/or silicide materials from a microelectronic device having same thereon are provided. The compositions of the invention are particularly useful in the etching of 3D NAND structures.