ALUMINUM COMPOUND AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
申请人:Samsung Electronics Co., Ltd.
公开号:US20200207790A1
公开(公告)日:2020-07-02
Provided are an aluminum compound and a method for manufacturing a semiconductor device using the same. The aluminum compound may be represented by Formula 1.
提供了一种铝化合物以及使用它制造半导体器件的方法。该铝化合物可用公式1表示。
Combes,A.; Combes,C., Bulletin de la Societe Chimique de France, 1892, vol. <3> 7, p. 791
作者:Combes,A.、Combes,C.
DOI:——
日期:——
Kazitsyna,L.A. et al., Journal of general chemistry of the USSR, 1961, vol. 31, p. 286 - 294
作者:Kazitsyna,L.A. et al.
DOI:——
日期:——
Synthesis, Characterization, and Cytotoxic Evaluation of Some Newly Substituted Diazene Candidates
作者:Mohamed El-Naggar、Abdel-Nasser El-Shorbagi、Dina H. Elnaggar、Abd El-Galil E. Amr、Mohamed A. Al-Omar、Elsayed A. Elsayed
DOI:10.1155/2018/3626824
日期:2018.11.1
5-amino-2-hydroxybenzoate or 1-aminonaphthalene by using NaNO2 in the presence of HCl afforded diazonium salt derivatives 2 and 5, which were treated with substituted imino or substituted amino derivatives, to give the corresponding substituted amino-pent-2-en-3-yl-diazenylbenzoate 4a–k or 2-substituted-1-(naphthalen-1-yl)diazene derivatives 6a–h, 7a,b, and 8a,b. All the synthesized compounds were