Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193 nm (ArF) imaging radiation.
不含
氟的光酸发生剂和含有不含
氟的光酸发生剂的光阻组合物作为PFOS/PFAS光酸发生剂含有的光阻的替代品。这些光酸发生剂的特点是含有不含
氟的杂环
磺酸盐阴离子组分。这些光酸发生剂最好含有一个离子阳离子组分,更好地是含有一个
磺酸盐阳离子组分。这些光阻组合物最好含有酸敏感的成像聚合物。这些组合物尤其适用于使用193 nm(ArF)成像辐射形成材料图案。