A near-infrared absorbing dye has an anion of formula (1) wherein A1 is H or CF3, R0 is OH or —OC(═O)—R′, and R′ is a monovalent hydrocarbon group. The dye has excellent solvent solubility as well as good optical properties and heat resistance, offering the advantages of easy coating and effective working during film formation. The dye free of heavy metal in its structure is advantageously used in the process of fabricating semiconductor devices.
一种近红外吸收
染料具有公式(1)的阴离子,其中A1为H或
CF3,R0为OH或—OC(═O)—R′,R′为一价烃基。该
染料具有优异的溶剂溶解性以及良好的光学性能和耐热性,具有易于涂覆和在薄膜形成过程中有效工作的优点。该
染料在其结构中不含重
金属,可以优点地用于制造半导体器件的过程中。