Integrated circuits having organic-inorganic dielectric materials and methods for forming such integrated circuits
申请人:——
公开号:US20040002617A1
公开(公告)日:2004-01-01
A method for making an integrated circuit is disclosed comprising depositing alternating regions of electrically conductive material and hybrid organic inorganic dielectric material on a substrate, wherein an area of dielectric material is formed by hydrolyzing a plurality of precursors to form a hybrid organic inorganic material comprised of a silicon oxide backbone and having an organic substituent bound to the backbone, and depositing the hybrid organic inorganic material on a substrate, removing the hybrid organic-inorganic material in selected areas, and depositing an electrically conductive material in the selected areas, wherein one of the precursors is a compound of the general formula R
1
R
2
R
3
SiR
4
, wherein R
1
, R
2
, R
3
are each bound to the Si and are independently an aryl group, a cross linkable group, or an alkyl group having from 1-14 carbons, and wherein R
4
is selected from the group consisting of an alkoxy group, an acyloxy group, an —OH group or a halogen. Also disclosed is a method for forming a hybrid organic inorganic layer on a substrate, comprising: hydrolyzing a silane selected from the group consisting of a tetraalkoxysilane, a trialkoxysilane, a trichlorosilane, a dialkoxysilane, and a dichlorosilane, with a compound of the general formula: R
1
R
2
R
4
MR
5
, wherein R
1
, R
2
and R
4
are independently an aryl, alkyl, alkenyl, epoxy or alkynyl group, wherein at least one of R
1
, R
2
and R
4
is fully or partially fluorinated, wherein M is selected from group 14 of the periodic table, and wherein R
5
is either an alkoxy group, OR
3
, or a halogen (X).
本发明公开了一种制造集成电路的方法,包括在基板上沉积交替区域的电导材料和混合有机无机介电材料,其中通过水解多种前体物质形成由硅氧骨架组成并具有有机取代基结合的混合有机无机材料形成介电材料区域,然后在基板上沉积混合有机无机材料,去除所选区域的混合有机无机材料,并在所选区域沉积电导材料,其中前体物质之一是具有一般式R1R2R3SiR4的化合物,其中R1、R2、R3分别与Si结合,并且独立地是芳基、交联基或具有1-14个碳的烷基,而R4选自具有烷氧基、酰氧基、—OH基或卤素的群。本发明还公开了一种在基板上形成混合有机无机层的方法,包括将一种选择自四烷氧基硅烷、三烷氧基硅烷、三氯硅烷、二烷氧基硅烷和二氯硅烷的硅烷与一种具有一般式R1R2R4MR5的化合物水解,其中R1、R2和R4独立地是芳基、烷基、烯基、环氧基或炔基,其中至少有一个R1、R2和R4是完全或部分氟化的,M选自周期表第14族元素,而R5是烷氧基、OR3或卤素(X)。