TEMPORARILY FIXING AGENT FOR SEMICONDUCTOR WAFER, AND PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE USING SAME
申请人:Sumitomo Bakelite Company Limited
公开号:EP2351804A1
公开(公告)日:2011-08-03
To provide a temporary bonding adhesive for a semiconductor wafer that reduces damage to a semiconductor wafer, makes it readily detachable, and can shorten the time required for thermal decomposition, and a manufacturing method for a semiconductor device using this.
A temporary bonding adhesive for a semiconductor wafer, being a temporary bonding adhesive used for temporarily bonding a semiconductor wafer onto a supporting substrate in order to process a semiconductor wafer, and for detaching a semiconductor wafer from a supporting substrate by heating after processing, containing a resin composition composition whereof the 50% weight loss temperature decreases after irradiation by active energy rays.
提供一种用于半导体晶片的临时粘接剂,该粘接剂可减少对半导体晶片的损坏,使其易于分离,并可缩短热分解所需的时间,以及使用该粘接剂的半导体器件的制造方法。
一种半导体晶片用临时粘接剂,是一种临时粘接剂,用于在加工半导体晶片时将半导体晶片临时粘接在支撑基板上,以及在加工后通过加热将半导体晶片从支撑基板上分离,该粘接剂含有一种树脂成分组合物,其50%失重温度在接受活性能量射线照射后会降低。