Resist underlayer film-forming composition containing polymer having arylene group
申请人:NISSAN CHEMICAL INDUSTRIES, LTD.
公开号:US10394124B2
公开(公告)日:2019-08-27
A resist underlayer film-forming composition for lithography process having characteristics of enabling wafer surface planarization after film formation, excellent planarization performance on substrate with level difference, and good embeddability in fine hole pattern. The resist underlayer film-forming composition including polymer having unit structure of Formula (1) and solvent,
wherein each of R1 to R4 is independently hydrogen atom or methyl group, and X1 is divalent organic group having at least one arylene group optionally substituted by alkyl group, amino group, or hydroxyl group, and wherein X1 in Formula (1) is organic group of Formula (2),
wherein A1 is phenylene group or naphthylene group, A2 is phenylene group, naphthylene group, or organic group of Formula (3), and dotted line is bond, and
wherein each of A3 and A4 is independently phenylene group or naphthylene group, and dotted line is bond.
一种用于光刻工艺的抗蚀剂底层成膜组合物,其特点是成膜后可使晶片表面平整化,在有水平差异的基底上具有优异的平整化性能,以及在细孔图案中具有良好的嵌入性。光刻胶底层成膜组合物包括具有式(1)单元结构的聚合物和溶剂、
其中 R1 至 R4 各自独立地为氢原子或甲基,X1 为二价有机基团,其中至少有一个芳烯基团可选地被烷基、氨基或羟基取代,且式(1)中的 X1 为式(2)的有机基团、
其中 A1 为亚苯基或萘基,A2 为亚苯基、萘基或式 (3) 的有机基团,虚线为键,以及
其中 A3 和 A4 各自独立地为亚苯基或亚萘基,虚线为键。