申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:EP0769485A1
公开(公告)日:1997-04-23
A positive photoresist composition comprising, as a photosensitizer, a quinonediazide sulfonic acid ester of a phenol compound represented by the following formula (I):
wherein Q1, Q2, Q3, Q4, Q5, Q6, Q7, Q8, Q9 and Q10 independently represent hydrogen, alkyl having 1-6 carbon atoms or phenyl, or Q1 and Q2, Q3 and Q4, Q5 and Q6, Q7 and Q8, or Q9 and Q10 may form a cycloalkane ring having 6 or less carbon atoms together with a carbon atoms to which they are connected, R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, R14, R15 and R16 independently represent hydrogen, hydroxyl, alkyl having 1-6 carbon atoms or phenyl; and m and n independently represent a number of 0 or 1;
and an alkali soluble resin;
and a quinonediazide sulfonic acid ester of a phenol compound of formula (I).
一种正性光刻胶组合物,其光敏剂包括下式(I)代表的苯酚化合物的醌噻磺酸酯:
其中 Q1、Q2、Q3、Q4、Q5、Q6、Q7、Q8、Q9 和 Q10 独立地代表氢、具有 1-6 个碳原子的烷基或苯基,或 Q1 和 Q2、Q3 和 Q4、Q5 和 Q6、Q7 和 Q8、R1、R2、R3、R4、R5、R6、R7、R8、R9、R10、R11、R12、R13、R14、R15 和 R16 独立地代表氢、羟基、具有 1-6 个碳原子的烷基或苯基;m 和 n 独立地代表 0 或 1;
一种碱溶性树脂;
和式 (I) 苯酚化合物的醌噻嗪化磺酸酯。