A method for forming a pattern contains (1) a step of forming an underlayer film containing (A) a radiation-sensitive acid generator capable of generating an acid upon exposure to radiation rays or (B) a radiation-sensitive base generator capable of generating a base upon exposure to radiation rays on a substrate; (2) a step of irradiating the underlayer film with radiation rays through a mask with a predetermined pattern to obtain an exposed underlayer film portion having been selectively exposed through the predetermined pattern; (3) a step of forming (C) an organic thin film on the underlayer film so as to attain chemical bonding of the exposed underlayer film portion with the organic thin-film formed on the exposed underlayer film portion; and (4) a step of removing the organic thin film formed on areas of the underlayer film other than the exposed underlayer film portion.
一种形成图案的方法包括:(1)在基板上形成一个底层薄膜,该底层薄膜包含(A)一种辐射敏感的酸发生剂,能够在辐射射线的作用下产生酸,或者(B)一种辐射敏感的碱发生剂,能够在辐射射线的作用下产生碱;(2)通过一个预定图案的掩模,用辐射射线照射底层薄膜,以获得已通过预定图案选择性暴露的底层薄膜部分;(3)在底层薄膜上形成一层有机薄膜,以实现暴露的底层薄膜部分与形成在暴露的底层薄膜部分上的有机薄膜的
化学键合;(4)去除除暴露的底层薄膜部分外的底层薄膜区域上形成的有机薄膜。