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Resist materials and processes of their use
申请人:AT&T Corp.
公开号:US05374504A1
公开(公告)日:1994-12-20
Resist materials sensitive to actinic radiation are formed from an acid generator and a material sensitive to acid. The acid from the acid generator interacts with the acid sensitive material to produce a change in solubility. Particularly useful acid generators included benzyl and naphthylmethyl sulfones.
抵抗感光辐射的材料是由酸发生剂和对酸敏感的材料形成的。酸发生剂中的酸与对酸敏感的材料相互作用,产生溶解度的变化。特别有用的酸发生剂包括苄基和萘基甲基磺酮。
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Khurana, Jitender M.; Bansal, Geeti; Sahoo, Prabhat K., Journal of Chemical Research, 2004, # 2, p. 139 - 140
作者:Khurana, Jitender M.、Bansal, Geeti、Sahoo, Prabhat K.
DOI:——
日期:——
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Cyclic Sulfones. The Condensation of Ethyl Oxalate with Arylmethyl Sulfones
作者:C. G. Overberger、Salomon P. Ligthelm、Edwin A. Swire
DOI:10.1021/ja01163a010
日期:1950.7
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Harris, Alan R., Synthetic Communications, 1988, vol. 18, # 7, p. 659 - 664
作者:Harris, Alan R.
DOI:——
日期:——
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HARRIS, ALAN R., SYNTH. COMMUN., 18,(1988) N 7, 659-663
作者:HARRIS, ALAN R.
DOI:——
日期:——