申请人:Rohm and Haas Electronic Materials LLC
公开号:EP2458440A1
公开(公告)日:2012-05-30
A photoacid generator compound has the formula (I):
G+ Z- (I)
wherein G has the formula (II):
wherein in formula (II), X is S or I, each R0 is commonly attached to X and is independently a C1-30 alkyl group; a polycyclic or monocyclic C3-30 cycloalkyl group; a polycyclic or monocyclic C6-30 aryl group; or a combination comprising at least one of the foregoing, G has a molecular weight of greater than 263.4 g/mol, or G has a molecular weight of less than 263.4 g/mol and one or more R0 groups are further attached to an adjacent R0 group, a is 2 or 3, wherein when X is I, a is 2, or when X is S, a is 2 or 3, and Z in formula (I) comprises the anion of a sulfonic acid, a sulfonimide, or a sulfonamide. A photoresist and coated film also includes the photoacid generator and a polymer, and a method of forming an electronic device uses the photoresist.
一种光酸发生器化合物具有式 (I):
G+ Z- (I)
其中 G 具有式 (II):
其中,在式 (II) 中,X 是 S 或 I,每个 R0 通常连接到 X 并独立地是 C1-30 烷基;多环或单环的 C3-30 环烷基;多环或单环的 C6-30 芳基;或包含至少一种上述基团的组合,G 的分子量大于 263.4 g/mol,或G的分子量小于263.4 g/mol,且一个或多个R0基团进一步连接到相邻的R0基团,a为2或3,其中当X为I时,a为2,或当X为S时,a为2或3,且式(I)中的Z包括磺酸、磺酰亚胺或磺酰胺的阴离子。光刻胶和涂膜还包括光酸发生器和聚合物,以及使用该光刻胶形成电子设备的方法。