METHOD FOR PRODUCING ACRYLATE DERIVATIVE, ACRYLATE DERIVATIVE, AND INTERMEDIATE THEREOF
申请人:Nakayama Osamu
公开号:US20110009643A1
公开(公告)日:2011-01-13
Provided are 1) a production process for an acrylic ester derivative capable of being a raw material of a polymer for obtaining a photoresist composition capable of forming a photoresist film which is excellent in a reactivity to acid and a heat stability and is less swollen in developing and which has a refractive index of preferably 1.72 or more in 193 nm and can be patterned, 2) an acrylic ester derivative obtained by the above production process and 3) alcohol and ester which are synthetic intermediates for the above acrylic ester derivative.
提供了以下内容:1)一种丙烯酸酯衍生物的生产工艺,该衍生物可以作为聚合物的原料,用于获得一种光阻组合物,该光阻组合物能形成一种对酸具有良好反应性和热稳定性的光阻膜,并且在显影时膨胀较少,其折射率在193纳米时最好为1.72或更高,并且可以进行图案化;2)通过上述生产工艺获得的丙烯酸酯衍生物;以及3)用于上述丙烯酸酯衍生物的合成中间体醇和酯。