申请人:Dow Silicones Corporation
公开号:US10990012B2
公开(公告)日:2021-04-27
A silsesquioxane-containing composition comprising a silsesquioxane resin and an oxaamine of formula (II) (see description), products prepared therefrom, photoresist compositions comprising the silsesquioxane-containing composition and a photoacid generator, products prepared therefrom, methods of making and using same, and manufactured articles and semiconductor devices containing same.
一种含硅倍半氧烷的组合物,包括硅倍半氧烷树脂和一种式(II)的氧杂胺(见描述),由此制备的产品,含硅倍半氧烷组合物和一种光酸发生器的光刻胶组合物,由此制备的产品,制造和使用方法,以及含有这些成分的制成品和半导体器件。