A negative resist composition is provided which is less likely to swell in an alkali developing solution. An alkali-developable negative resist composition is disclosed comprising a compound (A) which generates an acid upon exposure to radiation, and a resin component (B) which becomes insoluble in alkali under the action of an acid, wherein the component (B) is a resin component containing: (b1) a unit which becomes insoluble in an alkali solution as a result of the formation of a lactone under the action of an acid generated from the component (A), and (b2) a unit having an alcoholic hydroxyl group.
提供了一种在碱显影溶液中不易膨胀的底片抗蚀剂组合物。本发明公开了一种可碱显影的阴性抗蚀剂组合物,该组合物包括在暴露于辐射时产生酸的化合物(A)和在酸的作用下变得不溶于碱的
树脂组分(B),其中组分(B)是一种
树脂组分,包含:(b1)在组分(A)产生的酸的作用下形成内酯而变得不溶于碱溶液的单元,以及(b2)具有醇羟基的单元。