A resist composition comprising a base polymer and a sulfonium or iodonium salt of sulfonic acid containing a cyclic hydrocarbon-substituted amino group offers dimensional stability on PPD and a satisfactory resolution.
一种抗蚀剂组合物由基质聚合物和
磺酸的锍盐或
碘盐组成,
磺酸含有
环烃取代的
氨基,在 PPD 上具有尺寸稳定性和令人满意的分辨率。