申请人:Gordon Roy G.
公开号:US20110151615A1
公开(公告)日:2011-06-23
Bicyclic guanidine compounds are described. Metal bicyclic guanidinate and its use in vapor deposition processes to deposit a metal-containing thin film are also described. Methods of making alkaline earth metal N,N′dialkylacetamidinates or bicyclic guanidinates including dissolution of alkaline earth metal into liquid ammonia followed by addition of a solution of an amidine or guanidine ligand in the free base from are provided.
描述了双环胍化合物。还描述了金属双环胍酸盐及其在蒸发沉积过程中用于沉积含金属薄膜的用途。提供了制备碱土金属N,N′-二烷基乙酰胺基甲基胍酸盐或双环胍酸盐的方法,包括将碱土金属溶解于液氨中,然后加入游离碱的胺基甲基胍配体溶液。