RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A RESIST PATTERN AND SULFONIUM COMPOUND
申请人:SATO Mitsuo
公开号:US20130045446A1
公开(公告)日:2013-02-21
A radiation-sensitive resin composition includes a sulfonium compound represented by a general formula (1), and a first polymer that serves as a base resin. R represents a group represented by a general formula (2). n
1
to n
3
each independently represent an integer of 0 to 5 and n
1
+n
2
+n
3
≧1. X
−
represents an anion. The sulfonium compound is preferably a compound represented by a following general formula (1-1).