Nitride and carbonitride layers of titanium formed under high energy ion irradiation
作者:W. Ensinger、J. M. Mayne
DOI:10.1007/bf00553698
日期:——
Titanium nitride and carbonitride films were formed by evaporating titanium while simultaneously irradiating with energetic nitrogen ions in an atmosphere of N2 and C2H2+N2, respectively. The physical and chemical properties, such as composition, purity, hardness, adhesion and corrosion resistance behaviour, were examined with respect to the process parameters such as nitrogen ion current density and
通过蒸发钛,同时分别在 N2 和 C2H2+N2 气氛中用高能氮离子照射,形成氮化钛和碳氮化物膜。根据工艺参数(如氮离子电流密度和反应气体的工艺压力)检查物理和化学特性,如成分、纯度、硬度、附着力和耐腐蚀性能。可以在广泛的工艺参数范围内获得氮化物和碳氮化物相。氧污染在很大程度上取决于离子电流密度。在划痕测试中,TiN 沉积物的硬度值高达 2800 kgmm-2,附着力值高达 15 N 临界载荷。对于 TiCN,值为 4000 kgmm-2 和 10 N。