NOVEL SULFONIUM SALT COMPOUND, METHOD FOR PRODUCING THE SAME, AND PHOTOACID GENERATOR
申请人:DSP GOKYO FOOD & CHEMICAL CO., LTD.
公开号:US20150293445A1
公开(公告)日:2015-10-15
Provided is a sulfonium salt compound represented by the following general formula (I):
where R
1
and R
2
each denote the same or a different alkyl group having 1 to 18 carbon atoms, R
3
and R
4
each denote the same or a different alkyl group having 1 to 10 carbon atoms, and X
−
denotes a sulfone imide anion or a perfluoroalkanesulfonic acid anion, wherein the substituents denoted by R
3
O and R
4
O are each located at an arbitrary position selected from the 2-position to the 8-position of the naphthyl group.