Replacement solvents having improved properties and methods of using the same
申请人:Grzyll R. Lawrence
公开号:US20060166851A1
公开(公告)日:2006-07-27
CFC replacement solvent compositions, methods of using the same and methods of making the same. These compositions meet or exceed the solvency, flammability, and compatibility requirements for CFC's while providing similar or improved environmental and toxicological properties. These solvent compositions have application including, but not limited to, oxygen handling, refrigeration or heat pumps, electronics, implantable prosthetic devices, and optical equipment.
Replacement Solvents Having Improved Properties and Methods of Using the Same
申请人:GRZYLL Lawrence R.
公开号:US20090026418A1
公开(公告)日:2009-01-29
CFC replacement solvent compositions, methods of using the same and methods of making the same. These compositions meet or exceed the solvency, flammability, and compatibility requirements for CFC's while providing similar or improved environmental and toxicological properties. These solvent compositions have applications including, but not limited to, oxygen handling, refrigeration or heat pumps, electronics, implantable prosthetic devices, and optical equipment.
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
申请人:SCREEN Holdings Co., Ltd.
公开号:EP3249682A1
公开(公告)日:2017-11-29
Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.
公开了一种基板处理设备,包括以下单元:供应单元,用于在基板 W 的图案形成表面上供应熔融状态的加工液,其中包括可升华物质;凝固单元,用于在图案形成表面上凝固加工液,以产生凝固体;以及升华单元,用于使凝固体升华,以从图案形成表面上去除凝固体。在该装置中,可升华物质包括氟化碳化合物。
Substrate treating apparatus and substrate treating method
申请人:SCREEN Holdings Co., Ltd.
公开号:US10153181B2
公开(公告)日:2018-12-11
Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.
公开了一种基板处理设备,包括以下单元:供应单元,用于在基板 W 的图案形成表面上供应熔融状态的加工液,其中包括可升华物质;凝固单元,用于在图案形成表面上凝固加工液,以产生凝固体;以及升华单元,用于使凝固体升华,以从图案形成表面上去除凝固体。在该装置中,可升华物质包括氟化碳化合物。
SUBSTRATE TREATING METHOD, SUBSTRATE TREATING LIQUID AND SUBSTRATE TREATING APPARATUS
申请人:SCREEN Holdings Co., Ltd.
公开号:US20200135503A1
公开(公告)日:2020-04-30
A substrate treating method, liquid and apparatus are provided which can reduce the amount of sublimable substance used for the drying of a substrate while reducing the collapse of pattern. The substrate treating method includes a step of supplying a liquid to the pattern-formed surface of the substrate, a step of solidifying the liquid on the pattern-formed surface to form a solidified body and a step of subliming the solidified body so as to remove it from the pattern-formed surface. The substrate treating liquid includes a molten sublimable substance and a solvent, the freezing point of the sublimable substance being higher than the freezing point of the solvent. When the sublimable substance and the solvent are separated, the sublimable substance is settled and in the solidification step, the settled sublimable substance is solidified to have a height equal to or higher than the height of a pattern.