申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2813889A2
公开(公告)日:2014-12-17
In lithography, a composition comprising a novolak resin comprising recurring units derived from a phenolphthalein, Phenol Red, Cresolphthalein, Cresol Red, or Thymolphthalein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO2 substrates.
在光刻技术中,一种包含由酚酞、酚红、甲酚酞、甲酚红或百里酚酞递归单元组成的酚醛树脂的组合物用于形成光阻底层膜。底层膜可在碱水中剥离,不会对离子注入的硅基底或二氧化硅基底造成损坏。