申请人:Lee Youngjoon
公开号:US20060014913A1
公开(公告)日:2006-01-19
The present invention provides a star polymer which comprises a central core and three or more branches bonded to the central core, and has a weight average molecular weight of from 1,000 to 100,000, wherein at least one of the branches containing at least one repeating unit selected from the group consisting of the following repeating units (1), (2), (3), (4) and (9); and a process for producing the star polymer. The present invention also provides a chemically amplified positive resist composition comprising the star polymer and an acid generator.
本发明提供了一种星形聚合物,它包括一个中心核和三个或三个以上与中心核键合的分支,其重量平均分子量为 1,000 至 100,000 之间,其中至少一个分支含有至少一个选自下列重复单元(1)、(2)、(3)、(4)和(9)所组成的组的重复单元;以及一种生产该星形聚合物的工艺。本发明还提供了一种化学放大的正抗蚀剂组合物,该组合物包含星形聚合物和一种酸发生器。