The present application relates to semiconductor processing compositions comprising at least one compound containing at least one amidoxime functional group and to methods of using these compositions in semiconductor processing. The present application also describes the preparation of amidoximes for a semiconductor processing composition by (a) mixing a cyanoethylation catalyst, a nucleophile and an alpha-unsaturated nitrile to produce a cyanoethylation product; and (b) converting a cyano group in the cyanoethylation product into an amidoxime functional group.
本申请涉及包含至少一个含有至少一个酰胺
肟功能团的化合物的半导体加工组合物,以及使用这些组合物进行半导体加工的方法。本申请还描述了通过(a)混合
氰乙基化催化剂、亲核试剂和不饱和α腈以产生
氰乙基化产品;(b)将
氰乙基化产品中的
氰基团转化为酰胺
肟功能团来制备用于半导体加工组合物的酰胺
肟的方法。