申请人:Cabot Microelectronics Corporation
公开号:US10066126B2
公开(公告)日:2018-09-04
Described are compositions (e.g., slurries) useful in methods for chemical-mechanical processing (e.g. polishing or planarizing) a surface of a substrate that contains tungsten, the slurries containing abrasive particles, metal cation catalyst, phosphorus-containing zwitterionic compound, and optional ingredients such as oxidizer; also described are methods and substrates used or processed on combination with the compositions.
所述组合物(如浆料)适用于对含钨基材表面进行化学机械加工(如抛光或平面化)的方法,浆料含有研磨颗粒、金属阳离子催化剂、含磷齐聚物和氧化剂等任选成分;还描述了与组合物结合使用或加工的方法和基材。