Atomic Layer Deposition of Ni Thin Films and Application to Area-Selective Deposition
作者:Woo-Hee Kim、Han-Bo-Ram Lee、Kwang Heo、Young Kuk Lee、Taek-Mo Chung、Chang Gyoun Kim、Seunghun Hong、Jong Heo、Hyungjun Kim
DOI:10.1149/1.3504196
日期:——
Downlo Atomic Layer Deposition of Ni Thin Films and Application to Area-Selective Deposition Woo-Hee Kim, Han-Bo-Ram Lee, Kwang Heo, Young Kuk Lee, Taek-Mo Chung, Chang Gyoun Kim, Seunghun Hong, Jong Heo, and Hyungjun Kim* Department of Material Science and Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea School of Electrical and Electronic Engineering, Yonsei University
Ni 薄膜的下行原子层沉积及其在区域选择性沉积中的应用 Woo-Hee Kim、Han-Bo-Ram Lee、Kwang Heo、Young Kuk Lee、Taek-Mo Chung、Chang Gyoun Kim、Seunghun Hong、Jong Heo 和Hyungjun Kim* 浦项科技大学材料科学与工程系,浦项 790-784,延世大学韩国电气与电子工程学院,首尔 120-749,韩国物理与天文学系以及纳米跨学科项目Science and Technology, Seoul National University, Seoul 151-747, Korea Advanced Materials Division, Korea Research Institute of Chemical Technology, Daejeon 305-600, Korea