Salt suitable for an acid generator and a chemically amplified resist composition containing the same
申请人:Harada Yukako
公开号:US20070100158A1
公开(公告)日:2007-05-03
The present invention provides a salt of the formula (I):
wherein ring X represents polycyclic hydrocarbon group having tricycle or more and having 10 to 30 carbon atoms, and one or more hydrogen atom in the ring X is optionally substituted with alkyl group having 1 to 6 carbon atoms, alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms or cyano group; Q
1
and Q
2
each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; n shows an integer of 1 to 12; and A
+
represents a cation selected from the group consist of a cation of the following formulae (IIa), (IIb) and (IIc):
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
A metal-free direct trifluoromethylthiolation of sulfonium ylides with an electrophilic trifluoromethylthiolating reagent has been established, in which sulfonium salt or α-bromoacetic ester is employed as sulfonium ylide precursors. This trifluoromethylthiolation enables the straightforward construction of SCF3-substituted sulfonium ylides from a wide range of substrates, including ketones, esters
Practical and regioselective halo-trifluoromethylthiolation of sulfur ylides
作者:Hongmei Qin、Yimin Jia、Na Wang、Zhong-Xing Jiang、Zhigang Yang
DOI:10.1039/d0cc03171b
日期:——
practical and highly regioselective chloro- and bromo-trifluoromethylthiolation of sulfur ylides is reported using a difunctionalization strategy. In the reaction sequence, sulfur ylides presumably react with an electrophilic trifluoromethylthiolating reagent to generate an α-SCF3 substituted sulfonium salt intermediate, which then undergoes a substitution with nucleophilic halogens.