申请人:FUJI PHOTO FILM CO., LTD.
公开号:EP1612602A2
公开(公告)日:2006-01-04
A positive working photosensitive composition which is useful in the manufacturing step of a semiconductor such as IC, the manufacture of a circuit board such as liquid crystals and thermal heads, and other fabrication steps and has an excellent resolution and line edge roughness, and a method for forming a pattern using the same, are provided, which are a photosensitive composition containing (A) a resin having a repeating unit having a specific group, whose solubility in an alkaline developer increases by the action of an acid, and a method for forming a pattern using the same.
本发明提供了一种可用于集成电路等半导体的制造步骤、液晶和热敏头等电路板的制造以及其他制造步骤,并具有出色的分辨率和线边粗糙度的正向工作光敏组合物,以及使用该组合物形成图案的方法,该组合物是一种光敏组合物,其中含有(A)具有特定基团的重复单元的树脂,其在碱性显影剂中的溶解度在酸的作用下会增加,以及使用该组合物形成图案的方法。