Improved synthesis of the heteronuclear phosphido Mo–W complex and its use as MOCVD precursor
作者:Marino Basato、Enrico Brescacin、Eugenio Tondello、Giovanni Valle
DOI:10.1016/s0020-1693(01)00603-x
日期:2001.10
The heteronuclear complex [(Co)(4)Mo(mu -PMe2)(2)W(CO)(4)] (1) has been prepared by thermal cyclization of the linear dimer [(CO)(5)MoPMe2PMe2W(CO)(5)]. An improved yield in 1, with respect to the literature, has been obtained with a different synthetic route to the linear complex and with a better separation, by flash chromatography, of 1 from its homonuclear Mo-Mo and W-W congeners. The conditions of thermal cyclization are rather critical and in one case the major product was the phosphine complex [M(mu -PMe2)(CO)(3)(PMe3)](2) (M = Mo and W in 1/4 ratio: monoclinic, space group P2(1)/n, a = 9.568(1), b = 9.305(1), c = 15.009(2) Angstrom, beta = 102.3(1)degrees, Z = 2, R = 0.035, R-w = 0.036). Complex 1 is a convenient MOCVD precursor and sublimes at low temperatures, less than or equal to 85 degreesC, to give thin films of mixed MoO3/WO3 oxides or Mo/W alloys, depending on the deposition conditions. (C) 2001 Elsevier Science B.V. All rights reserved.