A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
提供了一种在基板上形成薄膜的方法,其中包括将含有过渡
金属和一个或多个烷基-1,3-二氮基
丁二烯配体的前体化合物与表面接触的步骤。然后将得到的修饰表面与活化化合物接触。