多色荧光成像数据的正确解释和再现需要小分子荧光探针的光谱稳定性,特别是在超分辨率成像的高(去)激发光强度下或在单分子应用中。我们提出了一种基于连续 Ru 和 Cu 催化转化的一系列光谱稳定罗丹明荧光团的合成方法,使用化学计量分析在其他荧光团的背景下评估它们对光漂白和光转换的稳定性,并证明了荧光团光产物的化学反应性。已经确定了提供抗光转换三芳基甲烷荧光团的取代模式,并证明了非蓝色标记在活细胞 STED 纳米显微镜中的适用性。
Photoresist underlayer film-forming composition and pattern forming process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2813892A2
公开(公告)日:2014-12-17
In lithography, a composition comprising a novolak resin comprising recurring units of fluorescein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO2 substrates.
Knecht, Justus Liebigs Annalen der Chemie, 1882, vol. 215, p. 83
作者:Knecht
DOI:——
日期:——
Kehrmann; Bohn, Chemische Berichte, 1914, vol. 47, p. 3057
作者:Kehrmann、Bohn
DOI:——
日期:——
Photoresist underlayer film-forming composition and pattern forming processes
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2813892B1
公开(公告)日:2020-06-17
UNDERLAYER FILM-FORMING COMPOSITION AND PATTERN FORMING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140363957A1
公开(公告)日:2014-12-11
In lithography, a composition comprising a novolak resin comprising recurring units of fluorescein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO
2
substrates.