A coating agent capable of favorably reducing the roughness of a resist pattern and a method for forming a resist pattern in which roughness is reduced. The method includes coating the resist pattern with the coating agent. The coating agent is a composition including a resin, a quaternary carbon-atom-containing compound, and a solvent, the quaternary carbon-atom-containing compound having an aliphatic hydrocarbon group having 1 to 8 carbon atoms and a group having a specific structure having a specific amount of ethylene oxide and/or propylene oxide added thereto.
一种能有效降低抗蚀剂图案粗糙度的涂层剂,以及形成粗糙度降低的抗蚀剂图案的方法。该方法包括用涂层剂涂布抗蚀图案。涂层剂是一种组合物,包括
树脂、含碳原子的季化合物和溶剂,含碳原子的季化合物具有 1 至 8 个碳原子的脂肪族烃基和具有特定结构的基团,其中添加了特定量的
环氧乙烷和/或环氧
丙烷。