To provide a silica-based film-forming composition, which can form a homogeneous silica-based film, a method of producing a substrate including a silica-based film using the composition, and an additive agent to be added to a silica-based film-forming composition. In a silica-based film-forming composition including a polysilazane (A) and a solvent (S), a nitrogen-containing polar organic solvent is included as the solvent (S). In addition, the composition including a polysilazane (A) and a nitrogen-containing polar organic solvent as the solvent (S) is coated onto the surface of a substrate to form a coated film, which is then baked to produce a substrate including a silica-based film.
提供一种可形成均匀
二氧化硅基薄膜的
二氧化硅基成膜组合物、一种使用该组合物生产包括
二氧化硅基薄膜在内的基材的方法,以及一种添加到
二氧化硅基成膜组合物中的添加剂。在包括聚
硅氮烷(A)和溶剂(S)的
硅基成膜组合物中,含氮极性有机溶剂被用作溶剂(S)。此外,将包括聚
硅氮烷 (A) 和作为溶剂 (S) 的含氮极性有机溶剂的组合物涂覆到基底表面以形成涂覆膜,然后烘烤基底以产生包括
硅基薄膜的基底。