A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R
1
represents an alkali-labile group. A represents an oxygen atom, —NR′—, —CO—O—
#
or —SO
2
—O—
##
, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and “#” and “##” each indicate a bonding hand bonded to R
1
.
-A-R
1
(x)
一种辐射敏感的
树脂组合物,包括第一聚合物,其中包括酸敏感基团,酸发生剂用于在辐射照射下产生酸,以及第二聚合物,其中包括
氟原子和由一般式(x)表示的功能基团。第二聚合物的
氟原子含量高于第一聚合物的
氟原子含量。R1表示碱敏感基团。A表示氧原子,-NR',-CO-O-#或-SO2-O-##,其中由A表示的氧原子不是直接与芳香环,羰基基团或亚砜基团结合的氧原子,R'表示氢原子或碱敏感基团,“#”和“##”分别表示与R1结合的键手。-A-R1(x)