A photosensitive resist composition comprising:
a polymer of tertiary-butyl acrylate having monomeric units of:
where 0.5≤a≤0.7; 0.15≤b≤0.3; 0.1≤c≤0.2; 0.3
一种光敏抗蚀剂组合物,包括
一种丙烯酸叔丁酯聚合物,其单体单元包括
其中 0.5≤a≤0.7; 0.15≤b≤0.3; 0.1≤c≤0.2; 0.3
Schubert, Justus Liebigs Annalen der Chemie, 1947, vol. 558, p. 10,30
RADIATION SENSITIVE COMPOSITIONS CONTAINING IMAGE QUALITY AND PROFILE ENHANCEMENT ADDITIVES
申请人:Arch Specialty Chemicals, Inc.
公开号:EP1301829A1
公开(公告)日:2003-04-16
EP1301829A4
申请人:——
公开号:EP1301829A4
公开(公告)日:2006-06-28
EP1303789A4
申请人:——
公开号:EP1303789A4
公开(公告)日:2005-09-28
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