Provided are novel symmetrical and asymmetrical bifunctional photodecomposable bases (PDBs) with dicarboxylate anion groups that show increased imaging performance. Also provided are photoresist compositions prepared with the bifunctional dicarboxylated PDBs and lithography methods that use the photoresist compositions of the present invention.
提供了一种新颖的对称和非对称的双功能光解基(PDBs),其具有二
羧酸阴离子基团,显示出增强的成像性能。同时提供了使用双功能二羧化PDBs制备的光刻胶组合物和利用本发明的光刻胶组合物的光刻方法。