申请人:KANSAI PAINT CO., LTD.
公开号:EP1788432A1
公开(公告)日:2007-05-23
A near infrared ray activation type positive resist composition comprising
(A) a vinyl-based polymer having a monomer unit having an alkali-soluble group blocked by an ether having an alkenyl group next to an ether oxygen,
(B) a photothermal converting substance generating heat by a light in the near infrared region,
(C) a thermal acid generator generating an acid by heat,
can provide a near infrared ray activation type positive resist composition which can be subjected to an exposure treatment in a complete bright room such as under a white light and the like, gives desired sensitivity and resolution, and of which baking treatment conditions can be relaxed or a baking treatment can be omitted, and a pattern formation method using the same.
一种近红外射线活化型正抗蚀剂组合物,包括
(A) 乙烯基聚合物,其单体单元具有碱溶性基团,该基团被醚封住,醚氧旁边具有烯基、
(B) 通过近红外区域的光产生热量的光热转换物质、
(C) 通过热量产生酸的热酸发生器、
本发明可提供一种近红外射线活化型正抗蚀剂组合物,该组合物可在完全明亮的室内(如在白光等下)进行曝光处理,可获得所需的灵敏度和分辨率,其烘烤处理条件可放宽或省略烘烤处理,还可提供使用该组合物的图案形成方法。