申请人:TAKEMOTO Ichiki
公开号:US20100028807A1
公开(公告)日:2010-02-04
An imide compound represented by the formula (I):
wherein R
1
represents a C1-C20 aliphatic hydrocarbon group etc., W
1
represents —CO—O— etc., Q
1
and Q
2
each independently represent a fluorine atom etc., and A represents a group represented by the formula (I-1):
wherein A
1
represents —CH
2
—CH
2
— etc., and a chemically amplified resist composition containing the same.