Polymers comprising recurring units of an acrylic derivative of fluorinated backbone represented by formula (1) are novel.
1
R
1
, R
2
and R
3
are independently H, F, C
1-20
alkyl or fluorinated C
1-20
alkyl, at least one of R
1
, R
2
and R
3
contains fluorine, and R
4
is a hydrophilic group. Using the polymers, chemical amplification positive resist compositions featuring low absorption of F
2
excimer laser light are obtained.
由式(1)代表的
氟化主链的
丙烯酸衍
生物的循环单元组成的聚合物是一种新型聚合物。
1
R
1
, R
2
和 R
3
独立地为 H、F、C
1-20
烷基或
氟化 C
1-20
烷基,R
1
, R
2
和 R
3
含有
氟,而 R
4
是亲
水基团。使用这种聚合物,
化学放大阳离子抗蚀剂成分具有低吸收 F
2
准分子激光的吸收率低的
化学放大正向光刻胶组合物。